Design of high temperature vacuum coating fixture

For large-size glass panels that require coating on the entire surface, when the coating environment is high, the traditional clamp clamping method cannot meet the needs of coating the entire surface of large-size glass. A new idea was proposed and a new fixture was designed to solve this problem. Using the characteristics of different thermal expansion coefficients of glass substrates and metal materials, a fixture combined with aluminum alloy and heat-resistant steel is designed to offset the deformation caused by high temperature, and the beveled edge of the glass substrate is used to support the glass.

In order to achieve the ideal coating effect, such as better waterproof and scratch resistance, higher film strength, and expected coating color, some films must be completed under high vacuum and high temperature environments, both of which are indispensable. In addition, general filters, lenses, etc. will take into account the effective area of the coating when coating, because the glass substrate is placed on the coating fixture during coating, and the part of the glass substrate in contact with the fixture must not be coated with the film material, so The effective area of the coating must be specified before coating.

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In production, many substrates require a full effective surface, that is, the entire substrate surface is an effective coating surface. At this time, for smaller-sized substrates, clips are generally used to clamp both sides of the substrate. But for larger size substrates, especially larger quality substrates, this method is no longer applicable.

If it is a large-size glass substrate, not only requires a full effective surface, but also requires coating in a high-temperature environment, and a new fixture needs to be designed. The specific problems to be solved are: (1) Substrate: touch screen panel, 600 mm×400 mm×3 mm, the tolerance of length, width and height are both ±0.1 mm, the chamfer of the coating surface is 0.5°, the material is domestic green plate, The entire surface is required to be the effective surface of the coating; (2) Coating environment: high temperature coating at 300 ℃ for 4 h.

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The method of using clamps to hold the glass substrate is not suitable for such a large-format substrate. Because of the high quality of the substrate, a clamp with a large clamping force is required to clamp the substrate, which may damage the glass substrate. At the same time, the rapidly rotating umbrella plate has a large centrifugal force, and this kind of clamp has poor stability, so it is not suitable for use.

Another idea is to use a 0.5° chamfer on the glass coating surface to support the glass, as shown.

At this time, pay attention that the width of the ribs cannot be greater than 0.3 mm, because about 0.15 mm of the coating from the edge of the ribs is incomplete, and it is not allowed to appear in the effective area of the coating. If the film is coated at room temperature, this fixture can fully meet the production requirements, but as mentioned earlier, the coating environment is high temperature 300 ℃, then the problem will appear.

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The combination of metal materials with different linear expansion coefficients can effectively offset the fit gap caused by the temperature difference. The linear expansion coefficient of glass spans a wide range, but is basically smaller than that of metal. All glass substrates can use such fixtures to solve such problems. However, this kind of fixture requires high accuracy, especially the larger size of the fixture, the processing difficulty and cost are relatively large, the processing problem should be considered when designing the fixture, and the best method is to adjust the size of the fixture by using spacers. In practical applications, this fixture effectively solves the problem of coating the entire surface of large-size glass.

Founded in 2015,Zunhua Baorui Titanium Equipment Co.,Ltd. is a manufacturer specializing in pvd vacuum ion coating equipment. The company’s products mainly include large plate coating machine, large tube collating machine, tool coating machine and LOW-E glass production line. Mr.Wang baijiang ,general manager of the company ,has been engaged in vacuum coating industry for more than 30 years. He continuously improve production technology, improve product performance and devote himself to provide customers with better product experience and higher production efficiency.