Introduction of arc heating evaporation coating of vacuum coating machine

Vacuum coating machine arc heating evaporation plating introduction, a heating method similar to the electron beam heating method is the arc discharge heating method. It also has the characteristics of avoiding the pollution of resistance heating materials or crucible materials, and the heating temperature is high. It is especially suitable for the evaporation of refractory metals and graphite with high melting point and certain conductivity. At the same time, the equipment used in this method is simpler than the electron beam heating device, so it is a relatively inexpensive evaporation device.

vacuum coating machine,pvd coating machine,pvd vacuum machine,vacuum ion coating machine,multi-arc ion coating machine

Under the normal coating pressure of 5 X 10-1Pa, the target current adjustment range is relatively large (for example, the target current adjustment range is 35-100A for a circular small plane titanium target with a diameter of 60mm), and the target current is the lower limit It can still work stably at 35A; the arc can be stabilized normally under the conditions of 10-3Pa high vacuum; the magnetic field is adjustable, the arc spot on the target surface is delicate, the arc spot shrinks toward the target center and expands to the target edge and moves evenly, and the target surface is etched Evenly.

In the arc evaporation device of the vacuum coater, the material to be evaporated is used to make the discharge electrode. During thin film deposition, the arc is ignited by adjusting the electrode spacing in the vacuum chamber of the vacuum coating machine, and the instantaneous high temperature arc will cause the electrode ends to evaporate, thereby achieving material deposition. Controlling the number or time of arc ignition can deposit a certain thickness of film.

The arc heating method of the vacuum coating equipment can adopt either the direct current heating method or the alternating current heating method. One of the disadvantages of this method is that it is easy to produce micron-sized electrode particles splashing during the discharge process, which will affect the uniformity of the deposited film.

vacuum coating machine,pvd coating machine,pvd vacuum machine,vacuum ion coating machine,multi-arc ion coating machine

Zunhua Baorui Titanium Technology Co., Ltd. is a well-known vacuum coating manufacturer, specializing in the manufacture of various vacuum coating equipment, providing industry customers with customized process solutions and coating equipment.