Research on Pulse Laser Deposition Technology of Vacuum Coating Machine

Pulsed laser deposition (PLD) of vacuum coating machine is a new type of film forming technology. PLD film preparation can be roughly divided into three processes: laser and target interact to generate plasma; plasma transport in space; plasma in A film is deposited on the substrate. Compared with other film-making technologies, PLD has the following characteristics and advantages:

vacuum coating machine,pvd coating machine,pvd vacuum machine,vacuum ion coating machine,multi-arc ion coating machine

1. The film deposited by the vacuum coating equipment can be consistent with the target composition. Due to the instantaneous explosive emission of the plasma of the vacuum coating machine, there is no preferred evaporation effect of the composition and the spatial constraint effect of the plasma emission along the target axis, so the composition of the vacuum coating machine film and the target material remain consistent. Due to the same principle, PLD can produce multi-component compound films containing volatile elements.

Second, the texture film or epitaxial single crystal film can be grown in situ at a lower temperature. Since the energy of the atoms in the plasma of the vacuum coating machine is much larger than the ion energy generated by the usual evaporation method, the migration and diffusion of atoms along the surface is more intense, so the epitaxial growth can also be achieved at lower temperatures, and the low pulse repetition frequency It also allows sufficient time for atoms to diffuse to a balanced position between two pulse emissions, which is conducive to the epitaxial growth of the film. This feature of PLD vacuum coating equipment makes it suitable for the preparation of high-quality high-temperature superconducting, ferroelectric, piezoelectric, electro-optical and other functional films.

3. It can obtain continuous ultra-thin films and prepare high-quality nano films.

4. The growth rate is fast and the efficiency is high.

vacuum coating machine,pvd coating machine,pvd vacuum machine,vacuum ion coating machine,multi-arc ion coating machine

5. The film-forming pollution of the vacuum coating machine is small. Since the laser is a very clean energy source, the vacuum coating equipment will not bring impurities into the target when it is heated, which avoids the problem of contamination of the deposited film when the coating raw materials are heated by using citrus.

Because the pulsed laser deposition technology of the vacuum coating machine has the above-mentioned outstanding advantages, coupled with the technical equipment is simple, the operation is easy to control, the multi-target platform with simple operation can be used, the flexibility is large, so the application range is wide, and it is a multi-component compound film , The preparation of multilayer films and superlattice films provides convenience. At present, the technology has been widely used in the preparation and research of various functional films, including high-temperature superconducting, ferroelectric, piezoelectric, semiconductor and superlattice films, and even can be used to prepare bioactive films, showing a wide range of Application prospects.

Zunhua Baorui Titanium Technology Co., Ltd. is a famous vacuum coating manufacturer, specializing in the manufacture of various vacuum coating equipment, providing customized process solutions and coating equipment for industry customers.