How is the film thickness of the vacuum coater measured? Development, status and future of hard coatings
After coating with a vacuum coater, what is the method for measuring the thickness of the film layer in order to measure the thickness of the film layer?
The most direct coating control method is the Quartz Crystal Microbalance Method (QCM), which directly drives the evaporation source and drives the baffle through the PID control cycle to maintain the evaporation rate.
As long as the instrument is connected to the system control software, it can control the entire coating process. However, the accuracy of (QCM) is limited, in part because it monitors the quality of the coated film rather than its optical thickness.
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In addition, although QCM is very stable at lower temperatures, it becomes very temperature sensitive when the temperature is high. During prolonged heating, it is difficult to prevent the sensor from falling into this sensitive area, causing significant errors in the film.
Optical monitoring is the preferred method of monitoring for high-precision coatings because it allows for more precise control of film thickness (if used properly).
The improvement in accuracy stems from many factors, but the most fundamental reason is the monitoring of optical thickness.
Development, current status and future of hard coating for vacuum coating equipment
The development, current status and future of vacuum coating equipment hard coatings, the market for hard coatings for vacuum coating equipment is expanding with the higher requirements of processing technology, and it has an increasingly large market in China. The application of hard coatings on tools is mainly based on market share: 70% for tool coating, 25% for mold coating, and 5% for parts. Vacuum coating machine hard coating technology mainly includes cathode arc ion plating technology and magnetron sputtering technology. Vacuum coating equipment The difference between arc technology and magnetron sputtering technology is mainly: arc technology can obtain nearly 90% ionization rate and faster deposition rate, but there are problems with droplets; vacuum coating machine magnetron sputtering technology can A flat surface is obtained, but both the ionization rate and the deposition rate are relatively low.
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Currently, both technologies are moving forward. Vacuum coating color green magnetron sputtering technology is also progressing. Closed magnetic field unbalanced magnetron sputtering technology can greatly improve the ionization rate and become the key to the quality improvement of magnetron sputtering film. With the combination of IF twin magnetron technology and unbalanced magnetron sputtering technology, the magnetron sputtering technology of vacuum coating equipment has been able to obtain a high-quality film equivalent to arc technology.