Development of hard coating for vacuum coating equipment EP series PLC application on vacuum coating machine
The development, current status and future of vacuum coating equipment hard coatings, the market for hard coatings for vacuum coating equipment is expanding with the higher requirements of processing technology, and it has an increasingly large market in China. The application of hard coatings on tools is mainly based on market share: 70% for tool coating, 25% for mold coating, and 5% for parts. Vacuum coating machine hard coating technology mainly includes cathode arc ion plating technology and magnetron sputtering technology. Vacuum coating equipment The difference between arc technology and magnetron sputtering technology is mainly: arc technology can obtain nearly 90% ionization rate and faster deposition rate, but there are problems with droplets; vacuum coating machine magnetron sputtering technology can A flat surface is obtained, but both the ionization rate and the deposition rate are relatively low.
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Currently, both technologies are moving forward. Vacuum coating color green magnetron sputtering technology is also progressing. Closed magnetic field unbalanced magnetron sputtering technology can greatly improve the ionization rate and become the key to the quality improvement of magnetron sputtering film. With the combination of IF twin magnetron technology and unbalanced magnetron sputtering technology, the magnetron sputtering technology of vacuum coating equipment has been able to obtain a high-quality film equivalent to arc technology.
In the future, with the increasing demand of the industry, the advantages of vacuum coating of optical sheet coating of vacuum coating machine, the requirements for hard coating will become more and more strict. Future coatings will have two major trends: superhard coatings and low coefficient of friction coatings.
1. Superhard coating Superhard coating generally refers to a hard coating with a Vickers hardness of 40 GPa or more. Mainly: 1) diamond coating (hardness 50-100GPa, related to crystal orientation)
2) Cubic boron nitride (e-BN) coating (hardness 50-80GPa)
3) Diamond-like coating (DLC, which can vary within a wide range of 10 GPa-60 GPa due to different process hardness)
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4) Carbon-nitrogen coating (CNx, hardness up to 15GPa-50GPa)
5) Nano-composite coating and nano-multilayer coating (TiN/NbN nano-multilayer coating hardness is 51GPa, TiYN/VN nano-layer coating hardness is up to 78GPa)
2. Low friction coefficient coating The low friction coefficient coating mainly includes molybdenum-based coating (molybdenum disulfide), and carbon-based coating (diamond, diamond-like, carbon-nitrogen coating, etc.), and the friction coefficient can reach 0.1 or less.
Application of EP series PLC in vacuum coating machine