The basic concept of PVD coating and its characteristics in the application of vacuum coating machine ion coating
Vacuum coating machine ion coating film in optical applications, vacuum coating machine multi-arc ion plating equipment technology is an important branch of vacuum application technology, vacuum coating machine multi-arc ion plating equipment has been widely used in optics, electronics, energy development, Physical and chemical equipment, construction machinery, packaging, civil products, surface science and scientific research. Vacuum coating equipment Multi-arc ion plating methods mainly include evaporation plating, sputtering plating, ion plating, beam deposition plating, and molecular beam epitaxy.
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Recommended reading: vacuum coating equipment, water ring vacuum pump selection, vacuum coating machine multi-arc ion plating film in optical, a piece of optical glass or quartz surface coated with one or several layers of different substances, you can become highly reflective or no The reflection (i.e., antireflection film) or any desired proportion of the reflective or transmissive material can also be used as a color filter for absorption of one wavelength and transmission for another wavelength. Vacuum coating machine multi-arc ion plating is required from large-diameter astronomical telescopes and various lasers, to large windows coated with jasmine in new buildings.
Vacuum coating equipment Multi-arc ion-coated anti-reflection coatings are widely used in photography and various lasers, and all the large-window coated glass of new buildings are needed. Antireflection coatings are used extensively on lenses for cameras and television cameras.
The basic concept and characteristics of PVD coating
PVD is an abbreviation for English & lsquo;Physical Vapor Deposition& rsquo; meaning physical vapor deposition. We now generally refer to vacuum vapor deposition, sputter coating, ion plating, etc. as physical vapor deposition.
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The more mature PVD methods mainly include multi-arc plating and magnetron sputtering. The multi-arc plating equipment is simple in structure and easy to operate. Its ion evaporation source can be operated by the power supply of the welding machine, and the arc-inducing process is similar to that of electric welding. Specifically, under a certain process pressure, the arc-ignition needle is briefly contacted with the evaporating ion source, disconnected, and the gas is discharged. . Since the cause of the multi-arc plating is mainly by means of the continuously moving arc spot, a molten pool is continuously formed on the surface of the evaporation source, and after the metal is evaporated, it is deposited on the substrate to obtain a thin film layer, which is compared with magnetron sputtering. Not only the target utilization rate is high, but also the metal ion ionization rate is high, and the bonding force between the film and the substrate is strong. In addition, the color of the multi-arc coating is relatively stable, especially in the case of TiN coating, each batch is easy to obtain the same stable golden yellow, making the magnetron sputtering method unattainable. The disadvantage of multi-arc plating is that under the condition of low temperature coating with a conventional DC power supply, when the coating thickness reaches 0.3 & mu; m, the deposition rate is close to the reflectance, and film formation becomes very difficult. Moreover, the surface of the film begins to falter. Another disadvantage of multi-arc plating is that since the metal is evaporated after melting, the deposited particles are large, the density is low, and the wear resistance is poorer than that of the magnetron sputtering method.
It can be seen that the multi-arc coating and the magnetron sputtering coating have their own advantages and disadvantages. In order to maximize their respective advantages and achieve complementarity, a multi-arc technology and a magnetic control technology are combined to form a coating machine. . Multi-arc plating is used in the process, and then increased by magnetron sputtering.