Vacuum coating machine working principle How to maintain the vacuum unit?
The working principle and structure of the vacuum coating machine, the true coating machine is the most widely used equipment for vacuum conditions. Its related components and components: mechanical pump, booster pump, oil dispersion pump, condensate pump, vacuum measurement system.
True coating machine principle
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Vacuum coating machine mainly refers to a kind of coating which needs to be carried out under a higher degree of vacuum, including many kinds, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to separate into evaporation and sputtering.
The composition of each part of the vacuum coating machine
First, the vacuum body - vacuum chamber
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According to the different requirements of processed products, the size of the vacuum chamber is also different. The most used ones are 1.3M, 0.9M, 1.5M, 1.8M, etc. The cavity is made of stainless steel and is requested to be rust-free and solid. Each part of the vacuum chamber has a connecting valve for connecting the pumping pumps.
Second, the auxiliary pumping system
The exhaust system uses "dispersion pump + mechanical pump + Roots pump + low temperature cold trap + polycold" to form the exhaust process: the mechanical pump first draws the vacuum chamber to a low vacuum condition of less than 2.0*10-2PA, for dispersion The pump is followed by the vacuum supply condition. Later, when the dispersion pump draws the vacuum chamber, the mechanical pump is combined with the oil dispersion pump to form a series connection, and the pumping action is completed in this manner.
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The exhaust system is an important part of the vacuum system of the coating machine. The main components are the mechanical pump, the booster pump (the first introduction to the Roots pump) and the oil dispersion pump.
Mechanical pump: Also called the foreline pump, the mechanical pump is the most widely used low-vacuum pump. It uses oil to adhere to the sealing effect and relies on the mechanical method to continuously change the volume of the suction cavity in the pump to make the pumped container. The volume of the internal gas continues to swell and then a vacuum is obtained.
There are many types of mechanical pumps. There are four types of slide valves (this is mainly used for large equipment), piston reciprocating, fixed-plate and rotary-type (this is now the most widely used, this article is first introduced).
Mechanical pumps are often used to remove dry air, but not to remove oxygen, explosive, and corrosive gases. Mechanical pumps are often used to remove permanent gases, but have no good effect on water vapor. So it can't get rid of water vapor. The primary effect of the rotary vane pump is the stator, rotor, shrapnel, etc. The rotor is inside the stator but not the same as the stator. Like two inscribed circles, the rotor slot is equipped with two shrapnels. The spring ensures that the shrapnel is tightly attached to the inner wall of the stator.
How to maintain the vacuum unit?
How to maintain the vacuum unit? Vacuum unit is one of the most commonly used equipment in industrial production, and in the process of use, it will often cause damage, so we must do its vacuum unit maintenance work, so that it can extend its service life, to achieve Value.
1. Always keep the environment around the pump clean and dry.
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2. The joint surface between the left and right side covers of the pump body is sealed with 107 resin.
3, must check the lubrication of each part, if you find that the lubricant is insufficient, you need to replenish the lubricant in time. If the lubricant is found to be unclean, it should be replaced in time, and the seal should be guaranteed when the bolt is re-inserted.
4. When disassembling, each component can not be hit with a heavy hammer, and the removed parts avoid bumps and abrasions. Pay special attention to the smoothness and smoothness of the sealing surface, otherwise it will cause air leakage after reassembly, so that the pump can not restore the original performance.
5. The removed parts are cleaned with gasoline and carbon tetrafluoride or ether, and can be assembled after drying.
6. When assembling the vacuum unit, pay attention to the gap between the two ends of the rotor and the left and right side covers. The gap between the rotor and the rotor and the rotor and the pump body should be adjusted in accordance with the specified requirements.
7. The vacuum unit must pay attention to the direction of the spiral sleeve before assembly. The side of the drive shaft close to the motor is left-handed, the side of the gear box is right-handed, and the driven shaft is opposite.
The above is the vacuum coating machine company to explain the vacuum unit's normal maintenance work, the maintenance can extend its service life, reduce the necessary losses for the company, so it is very important to say that the vacuum unit is usually maintained.