What is the principle of vacuum coating machine? What are the characteristics of magnetron sputtering coating technology?
Vacuum coating machine is the most widely used vacuum equipment in vacuum condition. It is usually composed of vacuum chamber, vacuum unit and electric control cabinet. The exhaust system is selected as “dispersion pump + mechanical pump + Roots pump + low temperature cold trap + Polycold" constitutes.
The company specializes in the development and production of vacuum coating equipment. The experienced skill team and excellent after-sales service team handle any problems encountered during the use of the equipment. Next, the structure of each part of the vacuum coating machine and its working principle will be described in detail.
First, the vacuum main body - the vacuum chamber is different according to the requirements of the processed products, the size of the vacuum chamber is also different, and the most used ones are 1.3M, 0.9M, 1.5M, 1.8M, etc., and the cavity is made of stainless steel. The request is not rust, solid, etc., and each part of the vacuum chamber has a connecting valve for connecting the pumping pumps.
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Second, the auxiliary pumping system: The exhaust system is an important part of the vacuum system of the coating machine. The main components are the mechanical pump, the booster pump (the first introduction to the Roots pump) and the oil dispersion pump. The exhaust system is composed of "dispersion pump + mechanical pump + Roots pump + low temperature cold trap + polycold".
The exhausting process is as follows: the mechanical pump first draws the vacuum chamber to a low vacuum condition of less than 2.0*10-2PA, and supplies the vacuum pump with the vacuum pumping condition. Later, when the dispersion pump draws the vacuum chamber, the mechanical pump cooperates with the oil dispersion. The pumps are connected in series, and the pumping action is completed in this way.
Mechanical pump: Also called the foreline pump, the mechanical pump is the most widely used low-vacuum pump. It uses oil to maintain the sealing effect and relies on the mechanical method to continuously change the volume of the suction cavity in the pump to make the pumped container. The volume of the internal gas continues to swell and then a vacuum is obtained.
1. Classification of mechanical pumps: There are many kinds of mechanical pumps, commonly used with slide valve type (this is mainly used for large equipment), piston reciprocating, fixed type and rotary type (this is now the most widely used, this article is the first Introduction) Four types.
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2. The mechanical pump is operated from the beginning of the atmosphere. Its primary parameters are ultimate vacuum and pumping rate. This is an important basis for planning and selecting mechanical pumps. The single-stage pump is capable of pumping the container from the atmosphere to an ultimate vacuum of 1.0*10-1PA, and the two-stage mechanical pump is capable of pumping the container from the atmosphere to 6.7*10-2 Pa or even higher.
What are the characteristics of magnetron sputtering coating technology?
What are the characteristics of magnetron sputtering coating technology? Magnetron sputtering coating is an advanced surface decoration coating technology, which has been rapidly developed in the present, and has appeared in two-pole, three-pole, magnetron and RF magnetron sputtering coating technologies.
Vacuum coating equipment company said that while PVD technology is developing, medium-temperature PVD coating, low-temperature PVD coating and low-pressure PVD coating have also been introduced. The purpose is to reduce the deposition temperature, reduce the brittle phase of the interface, reduce the amount of reaction gas, and realize automatic control and improvement. Plating quality. PVD coatings have also made new developments in coating type and structure by virtue of their easy-to-regulate chemical composition.
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The magnetron sputtering coating technology has a single performance, and the plating TiC or TIN has a significant improvement. In 1978, on the basis of the above coatings, Al2O3 coating with better chemical stability was added, and the thickness was up to 10 mp, and still had good bonding force. At present, PVD coatings can produce dozens of hard films, and can produce three or more multilayer films and gradient films.
The main feature of magnetron sputtering coating technology is that PVD deposition technology has been further improved and expanded, and the application of plasma activated vapor phase chemical deposition (PVD coating) technology has begun. Basic research has begun to take off and is receiving more and more attention.
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