Vacuum system structure
Structure of the vacuum system is a vacuum system affect the sealing key and the system leak rate, the vacuum system configuration is reasonable or not, it will directly affect the sealing and leakage rate system system.
1, as far as possible to avoid the occurrence of a small radius of curvature of the dead angle, to smooth the transition to check the brakes in the polishing, cleaning and cleaning.
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2. The pipeline connected to the vacuum chamber, such as the evacuation pipeline and the air supply pipeline, adopts a circular arc transition to make the gas passage unimpeded, but the convenience of cleaning and cleaning should be considered.
3. Carefully design the structure of various connecting parts in the vacuum chamber to make the air passage unblocked and avoid the air passage blockage.
4. Grind and polish the inner surface of the vacuum system. The brighter the surface, the less gas is absorbed, and the easier it is to obtain vacuum.
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5. Minimize the volume of the vacuum chamber and shorten the piping system.
Seal form selection
The sealing form can be selected according to the degree of vacuum required and the actual working needs.
After the sealing part is water-cooled, its temperature is around 80 °C, and the temperature of individual parts can reach above 100 °C). Therefore, choose the ideal sealing ring material.
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Used for vacuum sealing rubber materials, in addition to having a smooth surface, no scratches, no cracks, low permeability and gas output rate, good heat resistance and oil resistance, and certain strength, hardness and elasticity. Wait.