Vacuum coating machine working principle and component introduction

The working principle and structure of the vacuum coating machine, the true coating machine is the most widely used equipment for vacuum conditions. Its related components and components: mechanical pump, booster pump, oil dispersion pump, condensate pump, vacuum measuring system.

Vacuum coating machine mainly refers to a kind of coating which needs to be carried out under a higher degree of vacuum, including many kinds, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like. The main idea is to separate into evaporation and sputtering.

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Vacuum chamber

The size of the vacuum chamber varies according to the requirements of the processed product. The most used ones are 1.3M, 0.9M, 1.5M, 1.8M, etc. The cavity is made of stainless steel and is requested to be rust-free and solid. Each part of the vacuum chamber has a connecting valve for connecting the pumping pumps.

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Auxiliary pumping system

The exhaust system uses "dispersion pump + mechanical pump + Roots pump + low temperature cold trap + polycold" to form the exhaust process: the mechanical pump first draws the vacuum chamber to a low vacuum condition of less than 2.0*10-2PA, for dispersion The pump is followed by the vacuum supply condition. Later, when the dispersion pump draws the vacuum chamber, the mechanical pump is combined with the oil dispersion pump to form a series connection, and the pumping action is completed in this manner.

The exhaust system is an important part of the vacuum system of the coating machine. The main components are the mechanical pump, the booster pump (the first introduction to the Roots pump) and the oil dispersion pump.

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Mechanical pump: Also called the foreline pump, the mechanical pump is the most widely used low-vacuum pump. It uses oil to adhere to the sealing effect and relies on the mechanical method to continuously change the volume of the suction cavity in the pump to make the pumped container. The volume of the internal gas continues to swell and then a vacuum is obtained.

There are many types of mechanical pumps. There are four types of slide valves (this is mainly used for large equipment), piston reciprocating, fixed-plate and rotary-type (this is now the most widely used, this article is first introduced).

Mechanical pumps are often used to remove dry air, but not to remove oxygen, explosive, and corrosive gases. Mechanical pumps are often used to remove permanent gases, but have no good effect on water vapor. So it can't get rid of water vapor. The primary effect of the rotary vane pump is the stator, rotor, shrapnel, etc. The rotor is inside the stator but not the same as the stator. Like two inscribed circles, the rotor slot is equipped with two shrapnels. The spring ensures that the shrapnel is tightly attached to the inner wall of the stator.